This program spans a wide area ranging from materials to devices, circuits and integrated systems, and including fabrication, characterization, modeling, simulation and theoretical work. It involves 24 scientists covering the following fields:
- Nanostructures and nanomaterials, including semiconductor nanostructures (Si nanowires, Si nanocrystals, organic and molecular materials, graphene and other two dimensional materials, metal oxides and photonic materials .
- Nanofabrication processes (lithography and plasma processes, chemical vapor and atomic layer deposition, front-end processes, chemical and electrochemical processes)
- Electronic devices (FETs, information storage devices, RF passive devices)
- Sensors, microfluidics, energy harvesting devices (thermoelectric, mechanical), bio-devices, LEDs and solar cells
- Systems (gas and flow meters, thermoelectric generators, solar cell systems, biosystems)
The existing infrastructure constitutes a unique national nanofabrication/nanoelectronics facility, including the Silicon processing lab in a clean room area of 300 m2, complemented by satellite laboratories for Si micromachining, plasma etching, thin film deposition, chemical and electrochemical processes, as well as electrical, optical and structural characterization laboratories for materials, devices and systems. In addition to the above, the epitaxy and surface science lab, equipped with an MBE system, a colt wall CVD lab and analytical surface characterization tools and accessories, offers important possibilities in developing novel two-dimensional materials for nanoelectronics and other applications. The electron microscopy lab, with state-of-the art transmission electron microscopes, equipped with analytical techniques, offers an important characterization facility for novel materials and devices. The above integrated facility being unique in Greece, its role for the country is also unique in promoting high technology development in the field of micro and nanotechnologies, the transfer of technology and know-how to the industry and the development of human potential in the above fields.
The existing expertise and know-how within the different groups of the program, complimented by a unique integrated infrastructure developed throughout the years, make the program highly competitive at European and international level. The group members are very active in National and European projects and have established strong partnership with a large number of European groups. The researchers of this program are leading a large number of funded projects and have a long history in networking at European level. Participating to the European Institute of Nanoelectronics Sinano (www.sinano.eu), and founding member of the national scientific society Micro&Nano (www.micro-nano.gr).
Education and training are also among the main objectives of the program scientists. They contribute to the MSc and PhD programs of the Greek universities, with a major contribution to the MSc and Phd program on Microelectronics of the University of Athens and the MSc program on Microsystems and Nanodevices of the National Technical University of Athens.
The main long term objectives of the program include excellence in research, development of fundamental knowledge, development of novel technologies, processes and high added-value technology products, development of human potential through educational and training activities, and service provision in advanced technologies, as well as transfer of technology to the industry.