MODEL: OMEGA JUNIOR TEMPRESS
INSTALLATION PLACE: Cleanroom of “Nanotechnology and Microsystems Laboratory”, Department of Microelectronics
DESCRIPTION: 6 horizontal and atmospheric furnaces each one composed of a diffusion quartz tube, surrounded by 3 resistance heating coils, in which wafers are loaded on a quartz carrier vertical to the gas flow. Digital Process Controller is designed for highly accurate thermal processing parameters and interfaces directly with Digital Temperature Controller for complete automation of the process. The Temperature System Controller is designed to provide centralized control of the furnaces.