PLASMA ENABLED NANOFABRICATION AND APPLICATIONS – Publications-Journals

2020

Effect of Cold Atmospheric Plasma processing on quality and shelf-life of ready-to-eat rocket leafy salad
M. Giannoglou, P. Stergiou, P. Dimitrakellis, E. Gogolides, N.G. Stoforos, G. Katsaros
Innovative Food Science & Emerging Technologies, 66, 102502

Oxygen plasma micro-nanostructured PMMA plates and microfluidics for increased adhesion and proliferation of cancer versus normal cells: The role of surface roughness and disorder
A. Kanioura, V. Constantoudis, P. Petrou, D. Kletsas, A. Tserepi, E. Gogolides, M. Chatzichristidi, S. Kakabakos
Micro and Nano Engineering, 8, 100060

Three-dimensional (3D) hierarchical oxygen plasma micro/nanostructured polymeric substrates for selective enrichment of cancer cells from mixtures with normal ones
A. Kanioura, P. Petrou, D. Kletsas, A. Tserepi, M. Chatzichristidi, E. Gogolides, S. Kakabakos
Colloids and Surfaces B: Biointerfaces 187, 110675

Tailoring Wetting Properties at Extremes States to Obtain Antifogging Functionality
M. Tzianou, G. Thomopoulos, N. Vourdas, K. Ellinas, E. Gogolides
Advanced Functional Materials, 2006687

Optimization of antibacterial properties of “hybrid” metal-sputtered superhydrophobic surfaces
D. Kefallinou, K. Ellinas, T. Speliotis, K. Stamatakis, E. Gogolides, A. Tserepi
Coatings, 10 (1), 25

Homer meets nano: Shrinking 2700 year old Greek poetry with state-of-the-art nanotechnology
E. Gogolides
Micro and Nano Engineering, 8, 100061

Characterization of defects in line/space patterns (Conference Presentation)
V. Constantoudis, B. Williams, N. Kehagias, G. Papavieros, C.M.S. Torres, E. Gogolides
Metrology, Inspection, and Process Control for Microlithography XXXIV 11325

Neural network evaluation of geometric tip-sample effects in AFM measurements
A.A. Vekinis, V. Constantoudis
Micro and Nano Engineering, 8, 100057

Quantifying geometric tip-sample effects in AFM measurements using certainty graphs
A.A. Vekinis, V. Constantoudis
Micro and Nano Engineering, 8, 100067

Chemical vapor deposition of Cu films from copper(I) cyclopentadienyl triethylphophine: Precursor characteristics and interplay between growth parameters and films morphology
N. Prud’homme, V. Constantoudis, A.E. Turgambaeva, V.V. Krisyuk, D. Samélor, F. Senocq, C. Vahlas
Thin Solid Films, 701, 137967

Predicting the flow of cold plasma jets in kINPen: a critical evaluation of turbulent models
D. Passaras, E. Amanatides, G. Kokkoris
Journal of Physics D: Applied Physics, 53 (26), 265202

Multiscale Modeling in Chemical Vapor Deposition Processes: Models and Methodologies
N. Cheimarios, G. Kokkoris, A.G. Boudouvis
Archives of Computational Methods in Engineering, 1-36

2019

Atmospheric Plasma Nanotexturing of Organic-Inorganic Nanocomposite Coatings for Multifunctional Surface Fabrication
P. Dimitrakellis, A.C. Patsidis, A. Smyrnakis, G.C. Psarras, E. Gogolides
ACS Applied Nano Materials, 2 (5), 2969-2978

Atmospheric pressure plasma directed assembly during photoresist removal: A new route to micro and nano pattern formation
P. Dimitrakellis, A. Smyrnakis, V. Constantoudis, D. Tsoutsou, A. Dimoulas, E. Gogolides
Micro and Nano Engineering, 3, 15-21
and related no conflict of interest statement published as an Erratum to “Atmospheric pressure plasma directed assembly during photoresist removal: A new route to micro and nano pattern formation”, Micro and Nano Engineering, 3, p. 94

Motion of Drops with Different Viscosities on Micro-Nanotextured Surfaces of Varying Topography and Wetting Properties
P. Sarkiris, K. Ellinas, D. Gkiolas, D. Mathioulakis, E. Gogolides
Advanced Functional Materials, 29 (35), 1902905

A non-lithographic plasma nanoassembly technology for polymeric nanodot and silicon nanopillar fabrication
A. Smyrnakis, A. Zeniou, K. Awsiuk, V. Constantoudis, E. Gogolides
Frontiers of Chemical Science and Engineering, 13 (3), 475-484

Deep learning denoising of SEM images towards noise-reduced LER measurements
E. Giannatou, G. Papavieros, V. Constantoudis, H. Papageorgiou, E. Gogolides
Microelectronic Engineering, 216, 111051

Impact of line edge roughness on ReRAM uniformity and scaling
V. Constantoudis, G. Papavieros, P. Karakolis, A. Khiat, T. Prodromakis, P. Dimitrakis
Materials, 12 (23), 3972

TiO2 nanotree films for the production of green H2 by solar water splitting: From microstructural and optical characteristics to the photocatalytic properties
A. Miquelot, O. Debieu, V. Rouessac, C. Villeneuve, N. Prud’homme, J. Cure, V. Constantoudis, G. Papavieros, S. Roualdes, C. Vahlas
Applied Surface Science, 494, 1127-1137

Beware of symmetry breaking and periodic flow regimes in axisymmetric CVD reactor setups
N. Cheimarios, M. Kavousanakis, G. Kokkoris, A.G. Boudouvis
Computers and Chemical Engineering, 124, 124-132

Optimization of patterned surfaces for improved superhydrophobicity through cost-effective large-scale computations
V. Krokos, G. Pashos, A.N. Spyropoulos, G. Kokkoris, A.G. Papathanasiou, A.G. Boudouvis
Langmuir, 35 (20), 6793-6802

Edge placement error and line edge roughness
V. Constantoudis, G. Papavieros, E. Gogolides
Proceedings of SPIE – The International Society for Optical Engineering, 10959, art. no. 109591F

Denoising line edge roughness measurement using hidden Markov models
G. Papavieros, I. Kontoyiannis, V. Constantoudis, E. Gogolides
Proceedings of SPIE – The International Society for Optical Engineering, 10959, art. no. 109592Z

Deep learning nanometrology of line edge roughness
E. Giannatou, V. Constantoudis, G. Papavieros, H. Papagrorgiou, G.F. Lorusso, V. Rutigliani, F. Van Roey, E. Gogolides
Proceedings of SPIE – The International Society for Optical Engineering, 10959, art. no. 1095920

Defects in nano-imprint lithography line patterns: Computational modelling and measurement accuracy
V. Constantoudis, G. Whitworth, N. Kehagias, G. Papavieros, C.M. Sotomoyor Torres, E. Gogolides
Proceedings of SPIE – The International Society for Optical Engineering, 10958, art. no. 109581K

2018

Hydrophobic and superhydrophobic surfaces fabricated using atmospheric pressure cold plasma technology: A review
P. Dimitrakellis, E. Gogolides
Advances in Colloid and Interface Science, 254, 1-21

3D plasma nanotextured® polymeric surfaces for protein or antibody arrays, and biomolecule and cell patterning
K. Tsougeni, K. Ellinas, G. Koukouvinos, P.S. Petrou, A. Tserepi, S.E. Kakabakos, E. Gogolides
Methods in Molecular Biology, 1771, 27-40

Plasma induced degradation and surface electronic structure modification of Poly(3-hexylthiophene) films
M. Tountas, D.G. Georgiadou, A. Zeniou, K. Seintis, A, Soultati, E. Polydorou, S. Gardelis, A.M. Douvas, T. Speliotis, D. Tsikritzis, S. Kennou, M. Fakis, E. Gogolides, D. Tsoukalas, P. Argitis, M. Vasilopoulou
Polymer Degradation and Stability, 149, 162-172

How to Achieve Reversible Electrowetting on Superhydrophobic Surfaces
M.E. Kavousanakis, N.T. Chamakos, K. Ellinas, A. Tserepi, E. Gogolides, A.G. Papathanasiou
Langmuir, 34 (14), 4173-4179

Three-dimensional (3D) plasma micro-nanotextured slides for high performance biomolecule microarrays: Comparison with epoxy-silane coated glass slides
K. Tsougeni, K. Ellinas, G. Koukouvinos, P.S. Petrou, A. Tserepi, S.E. Kakabakos, E. Gogolides
Colloids and Surfaces B: Biointerfaces, 165, 270-277

Atmospheric plasma etching of polymers: A palette of applications in cleaning/ashing, pattern formation, nanotexturing and superhydrophobic surface fabrication
P. Dimitrakellis, E. Gogolides
Microelectronic Engineering, 194, 109-115

Plasma-etched, silicon nanowire, radial junction photovoltaic device
A. Smyrnakis, P. Dimitrakis, E. Gogolides
Journal of Physics D: Applied Physics, 51 (45), 455101

Roughness evolution and charging in plasma-based surface engineering of polymeric substrates: The effects of ion reflection and secondary electron emission
G. Memos, E. Lidorikis, G. Kokkoris
Micromachines, 9 (8), 415

Superhydrophobic fabrics with mechanical durability prepared by a two-step plasma processing method
K. Ellinas, A. Tserepi, E. Gogolides
Coatings 8 (10), 351, Featured article (invited contribution)

Setting up a proper power spectral density and autocorrelation analysis for material and process characterization
V. Rutigliani, G.F. Lorusso, D. De Simone, F. Lazzarino, G. Papavieros, E. Gogolides, V. Constantoudis, C.A. Mack
Journal of Micro/ Nanolithography, MEMS, and MOEMS, 17 (4), 041016

Line edge roughness metrology: Recent challenges and advances toward more complete and accurate measurements
V. Constantoudis, G. Papavieros, G. Lorusso, V. Rutigliani, F.V. Roey, E. Gogolides
Journal of Micro/ Nanolithography, MEMS, and MOEMS, 17 (4), 041014

Need for LWR metrology standardization: The imec roughness protocol
G.F. Lorusso, T. Sutani, V. Rutigliani, F. Van Roey, A. Moussa, A.-L. Charley, C. Mack, P. Naulleau, C. Perera, V. Constantoudis, M. Ikota, T. Ishimoto, S. Koshihara
Journal of Micro/ Nanolithography, MEMS, and MOEMS, 17 (4), 041009

A generalized electron energy probability function for inductively coupled plasmas under conditions of nonlocal electron kinetics
S. Mouchtouris, G. Kokkoris
Journal of Applied Physics, 123 (2), 023301

The interplay between surface charging and microscale roughness during plasma etching of polymeric substrates
G. Memos, E. Lidorikis, G. Kokkoris
Journal of Applied Physics, 123 (7), 073303

Computational investigation of actuation mechanisms of droplets on porous air-permeable substrates
P. Chrysinas, G. Pashos, N. Vourdas, G. Kokkoris, V.N. Stathopoulos, A.G. Boudouvis
Soft Matter, 14 (29), 6090-6101

Multifractal analysis of line-edge roughness
V. Constantoudis, G. Papavieros, G. Lorusso, V. Rutigliani, F. Van Roey, E. Gogolides
Proceedings of SPIE – The International Society for Optical Engineering, 10585, 1058534

Computational nanometrology of line-edge roughness: Noise effects, cross-line correlations and the role of etch transfer
V. Constantoudis, G. Papavieros, G. Lorusso, V. Rutigliani, F. Van Roey, E. Gogolides
Proceedings of SPIE – The International Society for Optical Engineering, 10589, 105890Y

Allowable SEM noise for unbiased LER measurement
G. Papavieros, V. Constantoudis, E. Gogolides
Proceedings of SPIE – The International Society for Optical Engineering, 10585, 105851W

Setting up a proper power spectral density (PSD) and autocorrelation analysis for material and process characterization
V. Rutigliani, G.F. Lorusso, D. De Simone, F. Lazzarino, G. Rispens, G. Papavieros, E. Gogolides, V. Constantoudis, C.A. Mack
Proceedings of SPIE – The International Society for Optical Engineering, 10585, 105851K

The need for LWR metrology standardization: The imec roughness protocol
G. F. Lorusso, T. Sutani, V. Rutigliani, F. Van Roey, A. Moussa, C. A. Mack, P. Naulleau, V. Constantoudis, M. Ikota, T. Ishimoto, S. Koshihara
Proceedings of SPIE – The International Society for Optical Engineering, 10585, 105850D

2017

Transition between stable hydrophilization and fast etching/hydrophilization of poly(methyl)methacrylate polymer using a novel atmospheric pressure dielectric barrier discharge source
P. Dimitrakellis, E. Gogolides, A. Zeniou, K. Awsiuk, J. Rysz, M.M. Marzec
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 35 (4), 041303

Superhydrophobic Paper by Facile and Fast Atmospheric Pressure Plasma Etching
P. Dimitrakellis, A. Travlos, V.P. Psycharis, E. Gogolides
Plasma Processes and Polymers, 14 (3), 1600069

Is There a Threshold in the Antibacterial Action of Superhydrophobic Surfaces?
K. Ellinas, D. Kefallinou, K. Stamatakis, E. Gogolides, A. Tserepi
Applied Materials and Interfaces, 9 (45), 39781-39789

Durable superhydrophobic and superamphiphobic polymeric surfaces and their applications: A review
K. Ellinas, A. Tserepi, E. Gogolides
Advances in Colloid and Interface Science, 250, 132-157

Fabrication of axial p-n junction silicon nanopillar devices and application in photovoltaics
A. Smyrnakis, P. Dimitrakis, P. Normand, E. Gogolides
Microelectronic Engineering, 174, 74–79

Microwave exposure as a fast and cost-effective alternative of oxygen plasma treatment of indium-tin oxide electrode for application in organic solar cells
A. Soultati, I. Kostis, G. Papadimitropoulos, A. Zeniou, E. Gogolides, D. Alexandropoulos, N. Vainos, D. Davazoglou, A. Speliotis, N.A. Stathopoulos, P. Argitis, M. Vasilopoulou
Journal of Physics D: Applied Physics, 50 (50), 505105

Plasma effects on the bacteria Escherichia coli via two evaluation methods
D. Vujošević, U. Cvelbar, U. Repnik, M. Modic, S. Lazović, T. Zavašnik-Bergant, N. Puač, B. Mugoša, E. Gogolides, Z.L. Petrović, M. Mozetič
Plasma Science and Technology, 19 (7), 075504

Electrical and optical characterization of an atmospheric pressure, uniform, large-area processing, dielectric barrier discharge
A. Zeniou, N. Puač, N. Škoro, N. Selaković, P. Dimitrakellis, E. Gogolides, Z.L. Petrović
Journal of Physics D: Applied Physics, 50 (13), 135204

Comparison of Helical and Helicon Antennas as Sources of Plasma Excitation Using a Full Wave 3D Electromagnetic Analysis in Vacuum
Y. Stratakos, A. Zeniou, E. Gogolides
Plasma Processes and Polymers, 14 4-5, 1600107-1600119

Binding kinetics of bacteria cells on immobilized antibodies in microfluidic channels: Modeling and experiments
A.S. Kastania, K. Tsougeni, V. Constantoudis, E. Gogolides
Sensors and Actuators, B: Chemical, 253, 247-257

Challenges in line edge roughness metrology in directed self-Assembly lithography: Placement errors and cross-line correlations
V. Constantoudis, G. Papavieros, E. Gogolides, A.V. Pret, H. Pathangi, R. Gronheid
Journal of Micro/ Nanolithography, MEMS, and MOEMS, 16 (2), 024001

Multifractal correlations in natural language written texts: Effects of language family and long word statistics
M. Chatzigeorgiou, V. Constantoudis, F. Diakonos, K. Karamanos, C. Papadimitriou, M. Kalimeri, H. Papageorgiou
Physica A: Statistical Mechanics and its Applications,469, 173-182

Nanocomposite thin film of Ag nanoparticles embedded in amorphous Al2O3 on optical sensors windows: Synthesis, characterization and targeted application towards transparency and anti-biofouling
C. Tendero, A.-M. Lazar, D. Samélor, O. Debieu, V. Constantoudis, G. Papavieros, A. Villeneuve, C. Vahlas
Surface and Coatings Technology, 328, 371-377

Multiscale Modeling of Low Pressure Plasma Etching Processes: Linking the Operating Parameters of the Plasma Reactor with Surface Roughness Evolution
S. Mouchtouris, G. Kokkoris
Plasma Processes and Polymers, 14, 4-5, 1600147-16001157

Books

Polymers: Plasma Micro-Nanotexturing and Plasma-Directed Organization
D. Kontziampasis, A. Tserepi, E. Gogolides
Encyclopedia of Plasma Technology DOI: 10.1081/E-EPLT-120052496, Copyright © 2017 by Taylor & Francis, p.1125-1137

Exploration of a low-Temperature PEALD technology to trim and smooth 193i photoresist
F. Lazzarino, S. Paolillo, A. Peter, D. De Roest, T. Seong, Y. Wu, S. Decoster, V. Rutigliani, G.F. Lorusso, V. Constantoudis, S. Van Elshocht, D. Piumi, K. Barla
Proceedings of SPIE – The International Society for Optical Engineering, 10146, 101460K

Line edge roughness measurement through SEM images: Effects of image digitization and their mitigation
G. Papavieros, V. Constantoudis
Proceedings of SPIE – The International Society for Optical Engineering, 10446, 104460K

2016

Radio frequency atmospheric plasma source on a printed circuit board for large area, uniform processing of polymeric materials
P. Dimitrakellis, A. Zeniou, Y. Stratakos, E. Gogolides
Plasma Sources Science and Technology, 25 (2), 025015

Nanostructured PMMA-coated Love wave device as a platform for protein adsorption studies
M. Gianneli, K. Tsougeni, A. Grammoustianou, A. Tserepi, E. Gogolides, E. Gizeli
Sensors and Actuators, B: Chemical, 236, 583-590

Three-dimensional plasma micro-nanotextured cyclo-olefin-polymer surfaces for biomolecule immobilization and environmentally stable superhydrophobic and superoleophobic behavior
K. Ellinas, K. Tsougeni, P.S. Petrou, G. Boulousis, D. Tsoukleris, E. Pavlatou, A. Tserepi, S.E. Kakabakos, E. Gogolides
Chemical Engineering Journal, 300, 394-403

Roughness threshold for cell attachment and proliferation on plasma micro-nanotextured polymeric surfaces: The case of primary human skin fibroblasts and mouse immortalized 3T3 fibroblasts
A. Bourkoula, V. Constantoudis, D. Kontziampasis, P.S. Petrou, S.E. Kakabakos, A. Tserepi, E. Gogolides
Journal of Physics D: Applied Physics, 49 (30), 304002

Plasma Nanotextured Polymeric Surfaces for Controlling Cell Attachment and Proliferation: A Short Review
A. Tserepi, E. Gogolides, A. Bourkoula, A. Kanioura, G. Kokkoris, P.S. Petrou, S.E. Kakabakos
Plasma Chemistry and Plasma Processing, 36 (1), 107-120

Surface passivation effect by fluorine plasma treatment on ZnO for efficiency and lifetime improvement of inverted polymer solar cells
E. Polydorou, A. Zeniou, D. Tsikritzis, A. Soultati, I. Sakellis, S. Gardelis, T.A. Papadopoulos, J. Briscoe, L.C. Palilis, S. Kennou, E. Gogolides, P. Argitis, D. Davazoglou, M. Vasilopoulou
Journal of Materials Chemistry A, 4 (30), 11844-11858

Electromagnetic simulation of helicon plasma antennas for their electrostatic shield design
Y. Stratakos, A. Zeniou, E. Gogolides
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 34 (3), 031307

Aged hydrogen silsesquioxane for sub-10 nm line patterns
X. Chen, T. Zhang, V. Constantoudis, S.-L. Zhang, Z. Zhang
Microelectronic Engineering, 163, 105-109

Long-range correlations and burstiness in written texts: Universal and language-specific aspects
V. Constantoudis, M. Kalimeri, F. Diakonos, K. Karamanos, C. Papadimitriou, M. Chatzigeorgiou, H. Papageorgiou
International Journal of Modern Physics B, 30 (15), 1541005

Editorial: Advances on statistical physics of complex systems
V. Constantoudis, D. Hristopulos, G. Kaniadakis, A.M. Scarfone
International Journal of Modern Physics B, 30 (15), 1502003

Droplet Mobility Manipulation on Porous Media Using Backpressure
N. Vourdas, G. Pashos, G. Kokkoris, A.G. Boudouvis, V.N. Stathopoulos
Langmuir, 32 (21), 5250-5258

Wetting transitions on patterned surfaces with diffuse interaction potentials embedded in a Young-Laplace formulation
G. Pashos, G. Kokkoris, A.G. Papathanasiou, A.G. Boudouvis
Journal of Chemical Physics, 144 (3), 034105

A multi-parallel multiscale computational framework for chemical vapor deposition processes
N. Cheimarios, G. Kokkoris, A.G. Boudouvis
Journal of Computational Science, 15, 81-85

Modeling of Charging on Unconventional Surface Morphologies of PMMA Substrates during Ar Plasma Etching
G. Memos, G. Kokkoris
Plasma Processes and Polymers, 13 (5), 565-578

A hybrid model for low pressure inductively coupled plasmas combining a fluid model for electrons with a plasma-potential-dependent energy distribution and a fluid-Monte Carlo model for ions
S. Mouchtouris, G. Kokkoris
Plasma Sources Science and Technology, 25 (2), 025007

Challenges in LER/CDU metrology in DSA: Placement error and cross-line correlations
V. Constantoudis, V.-K.M. Kuppuswamy, E. Gogolides, A.V. Pret, H. Pathangi, R. Gronheid
Proceedings of SPIE – The International Society for Optical Engineering, 9778, 97781X

Line width roughness accuracy analysis during pattern transfer in self-aligned quadruple patterning process
G.F. Lorusso, O. Inoue, T. Ohashi, E. Altamirano Sanchez, V. Constantoudis, S. Koshihara
Proceedings of SPIE – The International Society for Optical Engineering, 9778, 97780V

Invisible nanoatractions: Silica aerogel versus rare-earth magnets
I. Michaloudis, V. Constantoudis, Y. Tanaka
Proceedings of the International Astronautical Congress, IAC

Microfluidic sample preparation components for DNA-based food pathogen detection
K. Tsougeni, A.S. Kastania, G. Kaprou, A. Tserepi, E. Gogolides
20th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2016, pp. 681-682

Design and fabrication of a lab-on-a-chip (LOC) incorporating DNA amplification and detection on partially reduced graphene oxide biosensors
M. Filippidou, A. Stamouli, E. Tegou, G. Kaprou, Y. Petrou, A. Tserepi, S. Chatzandroulis
20th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2016, pp. 1031-1032