The activities in Plasma Nanotechnology can be seen schematically below:

Fig. 1 Schematic of activities of Plasma Nanotechnology

• The heart of our activities and our first objective is to advance and promote plasma nanofabrication, and plasma nanotechnology. This is seen as the central circle in the figure on the left and described in section A (see Research topics A on the right of this screen). Around plasma nanotechnology a series of activities are clustered.
• Our second objective is to develop nanometrology and characterization methodologies for nanostructure description (see topic B).
• Our third objective is to understand and improve plasma and other processes using modelling and simulation (see topic C).
• Our fourth objective is to exploit our plasma nanotechnology toolbox to enable a variety of applications (see topic D) with focus on: – Surface Engineering (“smart surfaces” see topic D1), – Microfluidics and Lab on Chip for Life Sciences (see topic D2), – NanoDevices for Energy (see topic D3).

For all these objectives, we work in coordination with the clean room facility, often transferring samples to and from it, and in collaboration with several other projects such as the biomicrosystems project, and the Lithography project, as well as several laboratories inside and outside of NCSR Demokritos. Our team operates two laboratories: a plasma nanotechnology and a microfludics laboratory.

RESEARCH TOPICS – PUBLICATION HIGHLIGHTS  

1. Plasma Nanofabrication-Plasma Nanotechnology

Plasma Nanofabrication – Download PDF

Recent selected publications on the topic

• Controllable fabrication of bioinspired three-dimensional ZnO/Si nanoarchitectures, Makarona, M.C. Skoulikidou, Th. Kyrasta, A. Smyrnakis, A. Zeniou, E. Gogolides, C. Tsamis, Materials Letters (2015) 142, 211-216.
• Optical properties of high aspect ratio plasma etched silicon nanowires: Fabrication-induced variability dramatically reduces reflectance, Smyrnakis, A., Almpanis, E., Constantoudis, V., Papanikolaou, N., Gogolides, E. 2015, Nanotechnology, 26 (8), 085301
• Ultra-high aspect ratio Si nanowires fabricated with plasma etching: Plasma processing, mechanical stability analysis against adhesion and capillary forces and oleophobicity, A. Zeniou, K. Ellinas, A. Olziersky, E. Gogolides, Nanotechnology (2014) 25 (3) art. no. 035302.
• “Controlling roughness: From etching to nanotexturing and plasma-directed organization on organic and inorganic materials”, Gogolides, E., Constantoudis, V., Kokkoris, G., Kontziampasis, D., Tsougeni, K., Boulousis, G., Vlachopoulou, M., Tserepi, A., (2011) Journal of Physics D: Applied Physics, 44 (17), art. no. 174021

B. Nanometrology and Nanostructure Characterization  

Nanometrology – Download PDF  

Recent selected publications on the topic

• Sidewall roughness in nanolithography: Origins, metrology and device effects, Nanolithography: The Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems, Constantoudis, V., Gogolides, E., Patsis, G.P., pp. 503-537, 2013 (Book Chapter)
• Three-dimensional geometrical modeling of plasma transfer effects on line edge roughness: Comparison with experiments and rules of thumb, Journal of Micro/ Nanolithography, MEMS, and MOEMS, Constantoudis, V., Kokkoris, G., Gogolides, E., 12 (4), art. no. 041310, 2013
• Resist roughness plays a key role in pattern transfer (invited news and opinions paper), Constantoudis, V., Kokkoris, G., Gogolides, E., SPIE Newsroom, 10.1117/2.1201302.004738, 2013
• A review of line edge roughness and surface nanotexture resulting from patterning processes, Gogolides E., Constantoudis V., Patsis G.P., Tserepi A., (2006) Microelectronic Engineering, 83 (4-9 SPEC. ISS.), pp. 1067-1072. (Review Paper)

C. Modelling and Simulation    

Modelling – Download PDF    

Recent selected publications on the topic

• A multi-parallel multiscale computational framework for chemical vapor deposition processes, N. Cheimarios, G. Kokkoris, A.G. Boudouvis, Journal of Computational Science (2015) 15, 81-85.
• Modeling of Charging on Unconventional Surface Morphologies of PMMA Substrates During Ar Plasma Etching, G. Memos, G. Kokkoris, Plasma Processes and Polymers (2015) 13 (5), 565–578.
• Comparison of continuous-flow and static-chamber μPCR devices through a computational study: the potential of flexible polymeric substrates, V.E. Papadopoulos, G. Kokkoris, I.N. Kefala, A. Tserepi, Microfluidics and Nanofluidics (2015) 19 (4), 867-882.
• Minimum Energy Paths of Wetting Transitions on Grooved Surfaces, G. Pashos, G. Kokkoris, A.G. Boudouvis, Langmuir (2015) 31 (10), 3059-3068.
• A modified phase-field method for the investigation of wetting transitions of droplets on patterned surfaces, G. Pashos, G. Kokkoris, A.G. Boudouvis, Journal of Computational Physics (2015) 283, 258-270.
• Investigation of the kinetics of the chemical vapor deposition of aluminum from dimethylethylamine alane: Experiments and computations,I.G. Aviziotis, T. Duguet, K. Soussi, G. Kokkoris, N. Cheimarios, C. Vahlas, A.G. Boudouvis, Physica Status Solidi (C) Current Topics in Solid State Physics (2015) 12 (7), 923-930.
• Characterization and global modelling of low-pressure hydrogen-based RF plasmas suitable for surface cleaning processes, Škoro, N., Puač, N., Lazović, S., Cvelbar, U., Kokkoris, G., Gogolides, E., Journal of Physics D: Applied Physics, 46 (47), art. no. 475206, 2013
• Ballistic and molecular dynamics simulations of aluminum deposition in micro-trenches, Kokkoris, G., Brault, P., Thomann, A.-L., Caillard, A., Samelor, D., Boudouvis, A.G., Vahlas, C., Thin Solid Films, 536, pp. 115-123, 2013
• Designing Non-uniform Wafer Micro-topography for Macroscopic Uniformity in Multi-scale CVD Processes, N. Kallikounis, G. Kokkoris, N. Cheimarios, A.G. Boudouvis, Chemical Vapor Deposition (2014) 20, 364-372.

D. Applications  

D1. “Smart” Nanostructured Surfaces  

“Smart” Nanostructured Surfaces – Download PDF

Recent selected publications on the topic

• Nanoscale Mechanical and Tribological Properties of Plasma Nanotextured COP Surfaces with Hydrophobic Coatings, D.A. Dragatogiannis, E. Koumoulos, K. Ellinas, A. Tserepi, E. lides, C.A. Charitidis, Plasma Processes and Polymers (2015) 12 (11), 1271-1283.
• Direct Covalent Biomolecule Immobilization on Plasma-Nanotextured Chemically Stable Substrates, K. Tsougeni, P.S. Petrou, K. Awsiuk, M.M. Marzec, N. Ioannidis, V. Petrouleas, A. Tserepi, S.E. Kakabakos, E. Gogolides, ACS Applied Materials and Interfaces (2015) 7 (27), 14670-14681.
• Superamphiphobic Polymeric Surfaces Sustaining Ultrahigh Impact Pressures of Aqueous High- and Low-Surface-Tension Mixtures, Tested with Laser-Induced Forward Transfer of Drops, Ellinas, K., Chatzipetrou, M.,Zergioti, I.,Tserepi, A., Gogolides, E., 2015, Advanced Materials, 27 (13), pp. 2231-2235
• Hierarchical micro and nano structured, hydrophilic, superhydrophobic and superoleophobic surfaces incorporated in microfluidics, microarrays and lab on chip microsystems (review), E. Gogolides, K. Ellinas, A. Tserepi, Microelectronic Engineering (2015) 132, 135-155.
• Plasma Micro-Nanotextured, Scratch, Water and Hexadecane Resistant, Superhydrophobic, and Superamphiphobic Polymeric Surfaces with Perfluorinated Monolayers, K. Ellinas, S.P. Pujari, D.A. Dragatogiannis, C.A. Charitidis, A. Tserepi, H. Zuilhof, E. Gogolides, Applied Materials and Interfaces (2014) 6 (9), 6510-6524
• Biomimetic, antireflective, superhydrophobic and oleophobic PMMA and PMMA-coated glass surfaces fabricated by plasma processing, D. Kontziampasis, G. Boulousis, A. Smyrnakis, K. Ellinas, A. Tserepi, E. Gogolides, Microelectronic Engineering (2014) 121, 33-38
• Parylene C surface functionalization and patterning with pH responsive microgels, P. Calcagnile, L. Blasi, F. Rizzi, A. Qualtieri, A. Athanassiou, E. Gogolides, M. De Vittorio, ACS Applied Materials and Interfaces (2014) 6 (18), 15708-15715
• Plasma etching of poly(dimethylsiloxane): Roughness formation, mechanism, control, and application in the fabrication of microfluidic structures, Vlachopoulou, M.-E., Kokkoris, G., Cardinaud, C., Gogolides, E., Tserepi, A., Plasma Processes and Polymers, 10 (1), pp. 29-40, 2013
• Plasma-assisted nanoscale protein patterning on si substrates via colloidal lithography, Malainou, A., Tsougeni, K., Ellinas, K., Petrou, P.S., Constantoudis, V., Sarantopoulou, E., Awsiuk, K., Bernasik, A., Budkowski, A., Markou, A., Panagiotopoulos, I., Kakabakos, S.E., Gogolides, E., Tserepi, A., Journal of Physical Chemistry A, 117 (50), pp. 13743-13751, 2013

D2. Microfluidics and Lab on Chip for Life Sciences

Microfluidics and Lab on Chip for Life Sciences – Download PDF

Recent selected publications on the topic

• A labyrinth split and merge micromixer for bioanalytical applications, I.N. Kefala, V.E. Papadopoulos, G. Karpou, G. Kokkoris, G. Papadakis, A. Tserepi, Microfluidics and Nanofluidics (2015) 19 (5), 1047-1059.
• A microfabricated cyclo-olefin polymer microcolumn used for reversed-phase chromatography, K. Tsougeni, K. Ellinas, H. Archontaki, E. Gogolides, Journal of Micromechanics and Microengineering (2015) 25 (1), art. no. 015005.
• Miniaturized devices for isothermal DNA amplification addressing DNA diagnostics, G.D. Kaprou, G. Papadakis, D.P. Papageorgiou, G. Kokkoris, V. Papadopoulos, I. Kefala, E. Gizeli, A. Tserepi, Microsystem Technologies (2015) 22 (7), 1529–1534.
• Miniaturized devices towards an Integrated Lab-on-a-chip Platform for DNA diagnostics, G. Kaprou, G. Papadakis, G. Kokkoris, V. Papadopoulos, l. Kefala, D. Papageorgiou, E. Gizeli, A. Tserepi, SPIE Microtechnologies, 4-6 May 2015, Barcelona, Spain, Progress in Biomedical Optics and Imaging – Proceedings of SPIE (2015) 9518, art. no. 95180G.
• Hierarchical micro and nano structured, hydrophilic, superhydrophobic and superoleophobic surfaces incorporated in microfluidics, microarrays and lab on chip microsystems, Gogolides, E., Ellinas, K., Tserepi, A., 2015, Microelectronic Engineering 132, pp. 135-155 (Review Paper)
• Superhydrophobic, passive microvalves with controllable opening threshold: exploiting plasma nanotextured microfluidics for a programmable flow switchboar, Ellinas, A. Tserepi, E. Gogolides, Microfluidics and Nanofluidics (2014) 17 (3), 489-498
• All-plastic, low-power, disposable, continuous-flow PCR chip withintegrated microheaters for rapid DNA amplification, D. Moschou, N. Vourdas, G. Kokkoris, G. Papadakis, J. Parthenios, S. Chatzandroulis, A. Tserepi, Sensors & Actuators B: Chemical (2014) 199, 470-478.
• A passive micromixer for enzymatic digestion of DNA, V.E. Papadopoulos, I.N. Kefala, G. Kaprou, G. Kokkoris, D. Moschou, G. Papadakis, E. Gizeli, A. Tserepi, Microelectronic Engineering (2014) 124, 42-46.
• Photolithography and plasma processing of polymeric lab on chip for wetting and fouling control and cell patterning, K. Tsougeni, A. Bourkoula, P. Petrou, A. Tserepi, S.E. Kakabakos, E. Gogolides, Microelectronic Engineering (2014) 124, 47-52.

  D3. Nanodevices for Energy  

Download PDF

Recent selected publications on the topic

• Optical properties of high aspect ratio plasma etched silicon nanowires: Fabrication-induced variability dramatically reduces reflectance, A. Smyrnakis, E. Almpanis, V. Constantoudis, N. Papanikolaou, E. Gogolides, Nanotechnology (2015) 26 (8), art. no. 085301.
• Influence of Fluorine Plasma Treatment of TiO2 Films on the Behavior of Dye Solar Cells Employing the Co(II)/(III) Redox Couple, M. Konstantakou, Th. Stergiopoulos, V. Likodimos, G.C. Vougioukalakis, L. Sygellou, A.G. Kontos, A. Tserepi, P. Falaras Journal of Physical Chemistry C (2014) 118 (30), 16760-16775.

PhD Alumni and Former Post docs

MSc Alumni

Patents

Download PDF

Project Webpages

Science for Piece project no 984555: Atmospheric Plasma Jet for Neutralization of CBW

Spin-off companies from our team

Awards-News-Highlights

-“LOVEFOOD” FP7-Project, in which NCSR “Demokritos” is a partner, was included in EU’s Edition “Achievements of FP7: Examples that Make us Proud”

-The plasma Nanotechnology – Lab on Chip group of INN is a partner of the H2020-ICT KET Innovation Action entitled LoveFood2Market. The project is a continuation of project (LOVE-FOOD 2012-2016) towards TRL 6, and it targets the development and commercialization of a new diagnostic system for pathogen detection in food samples. Drs Evangelos Gogolides, Angeliki Tserepi, Vasilios Constantoudis and Stavros Chatzandroulis from INN and Drs Dimitrios Mastellos, Sotirios Kakabakos and Panagiota Petrou from INRASTES participate in the project, which is coordinated by Dr. Electra Gizeli from the University of Crete-FORTH. 3 Companies (from Germany, France, Greece), and 2 more academic / research partners (from France and Czech republic) participate in the project.

-Our research team received the 2nd Prize of the Hellenic Innovation and Applied Research Contenst organized by Eurobank and the Hellenic Industry Association 2013. For more details please click here.

-Researchers from our team participating in the Nanometrisis spin-off company were selected among the top 30 finalists in the Hello Tomorrow innovation contest. The final selection will take place in Paris on June 25^th-27^th 2015, http://hello-tomorrow.org/

Media

Watch the video describing our technology:

(video in English)

(video in Greek)

Software

• For nanostructure metrology visit the web site of Nanometrisis spin-off company nanometrisis.com
• For Micro and nano topography evolution see phietch.com
• For plasma gas phase chemistry see plasma-r.com

Classes, tutorials and other educational material

• “Microelectronics and Microsystems fabrication processes”, (E. Gogolides, D. Davazoglou, A. Nassiopoulou), Postgraduate Programs on Microsystems and Nanodevices of the National Technical University of Athens and Micro and Nano Electronics of the National and Kapodistrian University of Athens

We acknowledge KLA-Tencor (www.kla-tencor.com) for providing 42 licenses of PROLITH Software for use by the graduate students of the classes “Micoelectronics and Microsystems Fabrication Processes” (Instructors D. Davazoglou, E. Gogolides, A. Nassiopoulou) by the two Masters Programs of Microelectronics and Microsystems (NKUA, NTUA coordinated respectively)

• “Fabrication and Characterization of nanostructures using plasma etching and bottom up techniques”, (E. Gogolides, C. Charitidis), Postgraduate Programs on Microsystems and Nanodevices of the National Technical University of Athens
• “Plasma Processing for Micro and Nano Fabrication”, (E. Gogolides, G. Kokkoris, V. Constantoudis, A. Tserepi), Postgraduate Program on Microelectronics of the National and Kapodistrian University of Athens
• “Microfluidic systems”, (D. Mathioulakis, I. Anagnostopoulos, A. Tserepi, G. Kokkoris), Postgraduate Program on Microsystems and Nanodevices of the National Technical University of Athens
• “Simulation of Micro and Nano-Patterning”, (E. Gogolides, G. Kokkoris, V. Constantoudis, A. Tserepi), Postgraduate Program on Mathematical Modelling in Modern Technologies and Financial Engineering of the National Technical University of Athens
• “Process and device simulation” (G. Kokkoris), Postgraduate Program on Microelectronics of the National and Kapodistrian University of Athens

Tutorials on line

• Listen to a talk about Microfluidics and microarrays on smart,plasma processed, polymeric substrates
• Watch us working in the lab during the Nano-bio-technology Summer School
• A Primer to Top-down Micro and Nano Patterning of Materials for Lab on a Chip applications
• Watch us working in the lab during the Nano-bio-technology Summer School: PDMS microfluidics

Services

We offer services as a part time to our research activities for small volume:

• Plasma etching of Silicon or polymers, and plasma surface modification
• Contact angle measurements
• Spectroscopic Ellispometry for film thickness measurement
• Reflectance transmittance measurement

For higher volume services please contact our spin-off companies