The objectives of this group include research and development in the following:
  • Process and material development
  • Characterization of CVD-ALD films
  • Applications of CVD-ALD films in:
1. Copper metallization of single- and multi- crystalline Si Solar Cells 2. Contact formation to organic Solar Cells 3. Gas Sensors based on various metal-oxide films (WO3, MoO3, VOx, TaOx, etc) 4. Large area electronics on metal-halide and -oxide semiconductors (MoS2, MoO3, Cu2S, Cu2O) The group offers CVD-ALD services:
  • Bubblers for liquid precursors
  • Custom made CVD-ALD chambers
The group also offers field test for solar PV panels  


Research Collaborator

Dr. Vourdas Nikos