 / Effects of image noise on contact edge roughness and critical dimension uniformity measurement in synthesized scanning electron microscope images

Effects of image noise on contact edge roughness and critical dimension uniformity measurement in synthesized scanning electron microscope images

V. Constantoudis, V.-K.M. Kuppuswamy, E. Gogolides, Journal of Micro/ Nanolithography, MEMS and MOEMS (2013) 12, 13005.