 / Three-dimensional geometrical modeling of plasma transfer effects on line edge roughness: Comparison with experiments and rules of thumb

Three-dimensional geometrical modeling of plasma transfer effects on line edge roughness: Comparison with experiments and rules of thumb

V. Constantoudis, E. Kokkoris, E. Gogolides, Journal of Micro/ Nanolithography, MEMS and MOEMS (2013) 12, 041310.