The project dealt with the application of the finite element method (FEM) as a means of simulating devices (or parts thereof) related to nanotechnology. Specifically, phenomena at the nanoscale such as the conductivity of nanoparticles on surfaces or in polymer matrices were studied, as well as parameters that affect the mechanical stresses exerted by thin films, such as immobilized biomolecules on microstructures. The results of the simulations were evaluated based on data from the literature while at the same time mechanical deformation sensors were developed and characterized for additional comparison with experimental measurements.