The objectives of this laboratory are: a) Synthesis of layers by novel Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) processes. b) Characterization of these layers and c) Applications in various domains including metal protection, metallization opto-electronc devices, fabrication of solar cells (organic and inorganic), displays and gas sensors.
a) Film deposition
The laboratory is equipped with:1) Low pressure CVD system for the deposition of W and WO3 layers. 2) Atmospheric pressure CVD system for the deposition of SnO2 (undoped and doped with Ta, F and Sb). 3) Metal-organic CVD system used in the past for Cu deposition and now for the deposition of MoS2 and TaS2 layers. 4) ALD system for MoO3, Ta2O5 and WO3 layers. The above systems are all home-made, automatically driven by PCs. Moreover, the laboratory is equipped with: 5) High vacuum thermal evaporator for Cu deposition and 6) primary vacuum thermal evaporator for the deposition of PTFE organic layers. Finally, the laboratory is equipped with 7) a screen printer enabling for the fabrication of printed electroluminescent devices and solar cell metallization.
Except of standard measurements performed in collaboration with others laboratories the CVD-ALD is also equipped with: 1) Programmable current source for current-voltage (I-V) measurements for various devices. 2) An accessory for the Spectroscopic Ellipsometer has been developed permitting simultaneous optical and electrical (I-V) measurements on samples at temperatures up to 400 oC. In this way the electrical conduction of a sample may be connected to its electronic structure, which is probed with the optical measurements. Such studies are particularly useful for metallic oxides in which the oxygen stoichiometry changes continuously with heating. 3) Also, there exist a satellite facility enabling for the characterization of solar cells and panels with power up to 1000 W at real conditions. The facility includes a data logger, heliometers, thermometers and the necessary electronic equipment for the measurement of the I-V characteristics of solar panels.
The applications span to various areas such as: 1) metallization of Si-based transistors and solar cells. 2) Modification of electrodes of organic- and perovskite- based solar cells and light emitting diodes (LEDs). 3) Fabrication of electronic gas sensors. 4) Fabrication of two-dimensional transistors. 5) Fabrication of electrochromic and electroluminescent displays. 6) Packaging of Solar cells (conventional and concentration). 7) Metal anti-corrosion and lubrication.