SEM01

Tool
FEI Quanta Inspect SEM

Applications
Conventional & Low pressure Scanning Electron Microscopy, Energy Dispersive X-ray Spectroscopy (EDX) analysis

Source
Thermionic gun W
Beam Voltage 0.2-30kV
Resolution 3.5nm@30kV
Detectors E-T, BS, LFD (low vacuum), EDX (light elements down to B), CCD IR inspection camera

Stage
Motorized x,y(±50mm), z(25mm), rotation (360 continuous), tilt (-10 to +80 deg)

Other Capabilities

•Low vacuum mode (up to 0.70 Torr)
•quantitative elemental analysis: point, line, area, map.
•Au & C coating of samples

Dr. Nikos Boukos (n.boukos@inn.demokritos.gr)