Advanced inline nano-metrology techniques for roll to roll nanoimprint lithography manufacturing processes - NanoMet

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ACRONYM:

NanoMet

LEADER:

Panagiotis Argitis

START DATE:

28/02/2020

LATE DATE:

27/11/2023

FUNDING SOURCE:

The aim of NanoMet is to develop a dimensional metrological system that will be non-destructive, cost-effective and capable of recording data in real time. The metrology system will be based on optical non-destructive measurements that will provide real-time information on the critical dimensions and the evolution of the characteristics of the manufactured nanostructured materials. In particular, information on the thickness of the depositing and stamping material as well as the dimensions of the printed structures will be measured in realtime. An important element for all the above measurements and for the evaluation of the metrology method is the control of the polymeric imprinting material. For that reason, polymeric materials with certain optical and chemical properties will be designed and developed and will create a database of features that will help in the comprehensive understanding and evaluation of the dimensional metrology platform. The NanoMet system is expected to be a major innovation in the field of industrial production based on continuous cylindrical manufacturing processes.

Funding : GSRI - EIDIKES DRASEIS (BIOMHXANIKA YΛIKA)

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