RESEARCH INTERESTS CVD-ALD PUBLICATIONS J. Paraszczak, J.M. Shaw, D.P. Kern, P. Argitis, D. Davazoglou, I. Raptis, D. Tsoukalas and E. Gogolides, Michael Hatzakis, semiconductor industry pioneer Micro and Nano Engineering, Volume 24, Pages: 100276, 2024 [doi]