Physical Vapour Deposition (PVD)

CONTACT PERSON:

Nikos Boukos

EMAIL:

n.boukos@inn.demokritos.gr

Ultra High Vacuum chamber for the growth of thin films by Physical Vapour Deposition (Electron Beam Evaporation).

2 Electron Guns that can work in parallel, sample holder with Temperature ranges between -200 and +850 oC

Capability to deposit a large range of materials with Angstrom accuracy

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