This program focuses on, integrated electronics, photonic devices and systems and nanoengineering. Our activities span a wide area ranging from the development of materials to the simulation of operation, fabrication and characterization of devices, circuits and systems. We provide advanced micro-and nano-fabrication and characterization services for industrial and academic partners and focus on the development of human potential. Our program involves 24 researchers and 1 functional scientist, working on the following fields:

• Nanostructures and nanomaterials, with a focus on semiconductor nanostructures, Si, organic and molecular materials, graphene and other two dimensional materials, metal oxides and photonic structures.
• Nanofabrication, and in particular lithography and plasma processes, molecular beam epitaxy, chemical vapor and atomic layer deposition, front-end processes, chemical and electrochemical processes.
• Characterization of electrical and optical properties, and imaging down to the nanoscale with electron and atomic force microscopy (TEM, SEM, AFM, STM).
• Electronic devices (FETs, TFTs, information storage devices, RF passive devices)
• Sensors and microfluidics, energy harvesting (thermoelectric, mechanical), optical and electrical biosensors and integrated bio-devices, LEDs and solar cells.
• Systems (lab-on-a-chip and biosensing systems, solar cells, gas and flow meters, thermoelectric generators)

The existing infrastructure constitutes a unique national nanofabrication/nanoelectronics facility, including a fully equipped silicon processing lab (furnaces, CVD, optical and e-beam lithography, dry etching, medium voltage implanter, deposition) in a clean room area of 300 square meters capable of sub-10nm nanopatterning, supported by a team of very experienced technicians and complemented by satellite laboratories for Si micromachining, plasma etching, thin film deposition, chemical and electrochemical processes, as well as electrical, optical and structural characterization laboratories for materials, devices and systems. In addition, the epitaxy and surface science lab, equipped with an MBE system, a cold wall CVD lab and analytical surface characterization tools and accessories, offers the possibility to develop novel two-dimensional materials for nanoelectronics and other applications. The electron microscopy lab, with state-of-the art transmission electron microscope, equipped with analytical techniques, offers imaging down to the atomic scale. This unique ecosystem and complementing infrastructure is enabling the transition from materials, to devices and to systems, promotion use of micro and nano-technologies, the transfer of technology and know-how to the industry, and the development of human capital. It is also the core facility of the recently funded INOVATION-EL initiative which will create a network of Greek nanofabrication, advanced materials, micro and nanoelectronics laboratories to serve the needs of the Greek academia and industry.

The members of our program are very active in National and European projects, have established strong partnerships with academia and industry, and have a long history in networking at European level. We are currently members of the European Institute

of Nanoelectronics Sinano (www.sinano.eu), and founding member of the national scientific society Micro&Nano (www.micro-nano.gr).

Education and training are also among our main objectives. Several MSc and PhD students from Greek universities are working in our labs, and we actively participate on the MSc program on Microelectronics (University of Athens), the MSc course on “Microsystems and Nanodevices” (National Technical University of Athens), the Applied Optoelectronics MSc program (University of Patras), the “Technological Applications of Physics” MSc program (National Technical University of Athens) and the undergraduate program of the School of Applied Mathematical and Physical Sciences (National Technical University of Athens).

Our long term objective is excellence in research and development of fundamental and applied knowledge, radical technologies, processes and high added-value devices and systems that could be transformed in state-of-the-art products.