Metal-organic CVD system used in the past for Cu deposition and now for the deposition of MoS2 and TaS2 layers.
Metal-organic CVD system used in the past for Cu deposition and now for the deposition of MoS2 and TaS2 layers. (upper left) general view of the system (upper right) the electronic control of the process, (lower left) the Direct Liquid Injection system and (lower right) the pressure control system. The reactor is placed in a glove box.