Low pressure CVD system for the deposition of W and WO3 layers.
Low pressure CVD system for the deposition of W and WO3 layers while operating (left), standby (middle). The electronic sub-systems for the control of flows and temperature (left).
![](https://inn.demokritos.gr/wp-content/uploads/2022/05/Low-pressure-CVD-system-for-the-deposition-of-W-and-WO3-layers-1024x241.jpg)
Low pressure CVD system for the deposition of W and WO3 layers while operating (left), standby (middle). The electronic sub-systems for the control of flows and temperature (left).