Tool 

FEI Quanta Inspect SEM

Applications 

Conventional & Low pressure Scanning Electron Microscopy, Energy Dispersive X-ray Spectroscopy (EDX) analysis

Source 

Thermionic gun W

Beam Voltage 

0.2-30kV

Resolution 

3.5nm@30kV

Detectors 

E-T, BS, LFD (low vacuum), EDX (light elements down to B), CCD IR inspection camera

Stage 

Motorized x,y(±50mm), z(25mm), rotation (360 continuous), tilt (-10 to +80 deg)

Other Capabilities 

Low vacuum mode (up to 0.70 Torr), quantitative elemental analysis: point, line, area, map.
Au & C coating of samples