Scanning Electron Microscope (SEM)
FEI Quanta Inspect SEM
Conventional & Low pressure Scanning Electron Microscopy, Energy Dispersive X-ray Spectroscopy (EDX) analysis
Thermionic gun W
E-T, BS, LFD (low vacuum), EDX (light elements down to B), CCD IR inspection camera
Motorized x,y(±50mm), z(25mm), rotation (360 continuous), tilt (-10 to +80 deg)
Low vacuum mode (up to 0.70 Torr), quantitative elemental analysis: point, line, area, map.
Au & C coating of samples