Physical Vapour Deposition (PVD)
Ultra High Vacuum chamber for the growth of thin films by Physical Vapour Deposition (Electron Beam Evaporation).
2 Electron Guns that can work in parallel, sample holder with Temperature ranges between -200 and +850 oC
Capability to deposit a large range of materials with Angstrom accuracy
![](https://inn.demokritos.gr/wp-content/uploads/2022/04/facilities_PVD.png)
![](https://inn.demokritos.gr/wp-content/uploads/2022/04/facilities_PVD2-1.png)