FEG HR Scanning-Transmission Electron Microscope (FEG S-TEM)

Tool

Thermo Fisher Scientific Talos F200i S/TEM

Applications

Conventional & High Resolution Transmission and Scanning / Transmission Electron Microscopy, Energy Dispersive X-ray Spectroscopy (EDX)

Source

Field Emission Gun

Beam Voltage

200kV

Detection

16 Mpixel CETA CMOS camera
4kx4k STEM imaging
Triple Thermo-Fisher 3 detectors system bright field (BF), annular dark field (DF1,DF2)
Fischione 3000 high angle annular dark field detector (HAADF)
EDX Bruker 6|T Flash 100 mm2 (light elements sensitivity down to Be)

Resolution

TEM point resolution: 0.25nm
TEM information limit: 0.12nm
STEM resolution: 0.16nm

Positioning

x,y movement: α tilt = ± 35o, β tilt = ± 30o

Other Capabilities

4 available S/TEM detectors: HAADF, DF4, DF2, BF
max solid angle for EDX: 1.3srad

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