HR Transmission Electron Microscope (TEM)
Tool
FEI CM20 TEM
Applications
Conventional & High Resolution Transmission Electron Microscopy, Electron Energy Loss Spectroscopy (EELS) and Energy Dispersive X-ray Spectroscopy (EDX) analysis
Source
Thermionic gun LaB6
Beam Voltage
200kV
Detection
1M pixel CCD camera with GIF
EDAX EDX system (light elements sensitivity down to B)
GATAN GIF200 imaging filter
Resolution
TEM point resolution: 0.27nm
TEM information limit: 0.18nm
Positioning
x,y movement: α tilt = ± 45o, β tilt = ± 30o
Other Capabilities
Energy Filtered TEM