Microfluidics Fabrication Lab

The group operates a microfluidics fabrication lab and related equipment. Some fabrication steps requiring lithography or surface chemical modification, such as the fabrication of the molds, surface functionalization, microchip sealing, etc. are carried out in the Clean Room Facility of the “Nanoelectronics, Photonics, and Microsystems” Program. The key-enabling Microfluidics fabrication lab comprises the following main equipment: 

  • Hydraulic heated press (Carver 3850), for hot embossing-based pattern formation and sealing of polymeric microfluidics.
  • Ultrasonic bonding machine, for sealing polymeric/plastic microfluidic devices (HiQ EVOLUTION 1200 by Herrmann Ultraschalltechnik GmbH & Co.).
  • Dry Film Roll Laminator (Model 305, Fortex), for substrate coating with foils and dry photoresists, as well as sealing of microfluidic chips (equipment borrowed from INRASTES, NCSR “Demokritos”).
  • Spinner (from SPS) for coating of thick photoresist and polymers.

Currently, the above equipment remains spread out in various rooms of INN, however a sufficient, dedicated space is now planned to be hosted at the new “Nanotechnology” building.

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