Thermal Evaporator (MBraun ProVap Evaporation System) integrated in Glovebox

A source material is evaporated in a chamber under high vacuum by heating the source at its boiling point and is deposited from the gas phase on a substrate where it forms a thin film. The thickness of the deposited film is measured by a quartz crystal microbalance. The system includes the evaporation chamber, a roughing pump, a control cabinet with media supply and high vacuum pump, a control panel and the film measurement unit.

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