High density plasma micro- nanotexturing system
New, home-made high-density plasma etching and micro- nanotexturing system incorporating our patented technology. The system is used mainly for micro- nanotexturing of polymers for superhydrophobic surface fabrication.
The system is equipped with a high-density helicon antenna plasma source, a magnetically confined diffusion chamber.The system accepts pieces up to 30cm in size. Gases used are O2.