The M2000-F Spectroscopic Ellipsometer system by J.A. WOOLLAM company may be used ex-situ or in-situ film characterization, and is equipped with a heating stage (home-made) for thermal property measurements of polymer films (Glass transition temperatures). 

SPECIFICATIONS

• Samples larger than 1x1 mm
• Maximum film thickness 10 um
• Wavelength range: 250nm – 900nm
• Lamp Type and model: Xenon Lamp L2194-01
• Angle of incidence: 75º

APPLICATIONS

• Thickness measurement
• Film roughness estimation
• In situ ellipsometry for real time thickness measurement. Mounting arms exist for attachment on Plasma Etching Reactor