Spectroscopic ellipsometer

The M2000-F Spectroscopic Ellipsometer system by J.A. WOOLLAM company may be used ex-situ or in-situ film characterization, and is equipped with a heating stage (home-made) for thermal property measurements of polymer films (Glass transition temperatures). 


  • Samples larger than 1x1 mm
  • Maximum film thickness 10 um
  • Wavelength range: 250nm – 900nm
  • Lamp Type and model: Xenon Lamp L2194-01
  • Angle of incidence: 75º


  • Thickness measurement
  • Film roughness estimation
  • In situ ellipsometry for real time thickness measurement. Mounting arms exist for attachment on Plasma Etching Reactor
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