SEM/EDS

Tool

JSM 7401F (JEOL) Field Emission SEM (FESEM) equipped with Xplore15 EDS (Oxford)

Applications

Conventional SEM operation. EDX nanoanalysis. General forensic investigation in the SEM. Gentle beam option to study non-conductive samples. 

Materials: metals, ceramics and carbon, plastics, polymers, oxides, semiconductors, composites, nanoparticles, mixed oxides

Technical Specifications

Source: Cold field emission electron gun (Tungsten single crystal emitter)

Beam Voltage: 0.1 to 30 kV

Resolution: 1.0nm (15kV), 1.5nm (1kV)

Detectors: Three Electron Detectors + Camera: Upper secondary electron in-lens (SEI), Lower secondary electron (LEI), Retractable backscattered electrons detectors (RBEI) & IR camera

Stage: Eucentric goniometer stage. 

Computer controlled 3-axis: X-Y: 70 x 50mm, rotation R:360o and manual handling of Z-axis: 1.5 up to 25mm and tilt from -5o up to +70o

Other Capabilities: Magnification up to x1.000.000, Vacuum down to 10-8Pa, Sample Size: From 10mm x 10mm to 10cm x 10cm, Maximum Sample Height: 10mm

EDS

Detector area: 15mm² 

Resolution: Guaranteed Mn Ka<129eV resolution 

Max count rates: in excess of 1Mcps

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