Institute of Nanoscience and Nanotechnology (INN)
  • THE INSTITUTE
    • At a Glance
    • Vision and Mission
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  • RESEARCH
    • About
    • Chemical Sciences for Nanostructures and Biological Applications
      • Advanced EPR methods and electron spin dynamics in molecular and nano-scale materials
      • Computational modeling of nanostructured materials
      • Chemical biology of natural products and designed molecules
      • Free radicals in bio- and nano-technology
      • Molecular computational chemistry
      • Natural product synthesis and bioorganic chemistry
      • SOL-GEL nanotechnology and surface science
      • Statistical mechanics and dynamical complex systems
      • Structural & supramolecular chemistry
    • Cultural Heritage
      • Ceramics and composite materials
      • Material and environmental isotope geochemistry (stables isotopes and radiocarbon)
      • Palaeoenvironment and ancient metals studies
    • Magnetism and Superconductivity: Advanced Materials and Applications
      • Crystallography and coordination chemistry of materials
      • Molecular magnetic and bioinorganic spectroscopy
      • Nanofunctional and nanocomposite materials
      • Nuclear magnetic resonance spectroscopy
      • Permanent magnets, magnetic recording and thermoelectrics
      • Superconductivity and magnetic oxides
      • Synchrotron x-ray and neutron investigations of strongly correlated electron materials and nanoparticles
      • Theoretical physics of multielectron and magnetic systems
    • Nanoelectronics, Photonics and Microsystems
      • Circuits and devices for sensor networks and systems
      • Electron microscopy and nanomaterials
      • Energy harvesting and autonomous sensors
      • Graphene and two dimensional materials for nanoelectronics
      • Materials and devices for information storage and emerging electronics
      • Materials for nanolithography and organic electronics
      • Molecular engineering of photo-functional self-assembled nanosystems
      • Microfluidics, Lab- & Organ-on-a-Chip
      • Molecular materials as components of electronic devices
      • Nanostructures for nanoelectronics, photonics and sensors
      • Plasma enabled nanofabrication and applications
      • Optical biosensors
      • Polymer based sensor and systems
      • Theoretical modeling of waves in the micro and nanoscale
      • Thin films by chemical vapor and atomic layer deposition
      • Thin film devices for microsystems and large area electronics
    • Nanochemistry and Nanomaterials
      • Advanced ceramics and composites
      • Functional nanomaterials of organized structure
      • Catalytic-photocatalytic processes and environmental analysis
      • Membranes and materials for environmental separations
      • Molecular thermodynamics and modeling of materials
      • Nanotechnology processes for solar energy conversion and environmental protection
      • Transport of matter phenomena in polymers
    • Funded Projects
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  • EDUCATION
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    • Joint Phd Programs
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    • Our students
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  • PERSONNEL
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  • NANOELECTRONICS, PHOTONICS AND MICROSYSTEMS
    • Circuits and Devices for Sensor Networks and Systems
    • Electron Microscopy and Nanomaterials
    • Energy Harvesting and Autonomous Sensors
    • Graphene and two Dimensional Materials for Nanoelectronics
    • Materials and Devices for Information Storage and Emerging Electronics – About the Group
    • Materials for Nanolithography and Organic Electronics
    • Microfluidics, Lab- & Organ-on-a-Chip
    • Molecular Engineering of Photo-Functional Self-Assembled Nanosystems
    • Molecular Materials as Components of Electronic Devices
    • Nanostructures for Nanoelectronics, Photonics and Sensors
    • Optical Biosensors
    • Plasma Enabled Nanofabrication and Applications
    • Polymer Based Sensor and Systems
    • Theoretical Modeling of Waves in the Micro and Nanoscale
    • Thin Films By Chemical Vapor and Atomic Layer Deposition
    • Thin Film Devices for Microsystems and Large Area Electonics

THIN FILMS BY CHEMICAL VAPOR AND ATOMIC LAYER DEPOSITION – Publications-Conferences


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