Institute of Nanoscience and Nanotechnology (INN)
  • THE INSTITUTE
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  • RESEARCH
    • About
    • Chemical Sciences for Nanostructures and Biological Applications
      • ADVANCED EPR METHODS AND ELECTRON SPIN DYNAMICS IN MOLECULAR AND NANO-SCALE MATERIALS
      • COMPUTATIONAL MODELING OF NANOSTRUCTURED MATERIALS
      • CHEMICAL BIOLOGY OF NATURAL PRODUCTS AND DESIGNED MOLECULES
      • FREE RADICALS IN BIO- AND NANO-TECHNOLOGY
      • MOLECULAR COMPUTATIONAL CHEMISTRY
      • NATURAL PRODUCT SYNTHESIS AND BIOORGANIC CHEMISTRY
      • SOL-GEL NANOTECHNOLOGY AND SURFACE SCIENCE
      • STATISTICAL MECHANICS AND DYNAMICAL COMPLEX SYSTEMS
      • STRUCTURAL & SUPRAMOLECULAR CHEMISTRY
    • Cultural Heritage
      • CERAMICS AND COMPOSITE MATERIALS
      • MATERIAL AND ENVIRONMENTAL ISOTOPE GEOCHEMISTRY (STABLES ISOTOPES AND RADIOCARBON)
      • PALAEOENVIRONMENT AND ANCIENT METALS STUDIES
    • Magnetism and Superconductivity: Advanced Materials and Applications
      • CRYSTALLOGRAPHY AND COORDINATION CHEMISTRY OF MATERIALS
      • MOLECULAR MAGNETIC AND BIOINORGANIC SPECTROSCOPY
      • NANOFUNCTIONAL AND NANOCOMPOSITE MATERIALS
      • NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY
      • PERMANENT MAGNETS, MAGNETIC RECORDING AND THERMOELECTRICS
      • SUPERCONDUCTIVITY AND MAGNETIC OXIDES
      • SYNCHROTRON X-RAY AND NEUTRON INVESTIGATIONS OF STRONGLY CORRELATED ELECTRON MATERIALS AND NANOPARTICLES
      • THEORETICAL PHYSICS OF MULTIELECTRON AND MAGNETIC SYSTEMS
    • Nanoelectronics, Photonics and Microsystems
      • CIRCUITS AND DEVICES FOR SENSOR NETWORKS AND SYSTEMS
      • ELECTRON MICROSCOPY AND NANOMATERIALS
      • ENERGY HARVESTING AND AUTONOMOUS SENSORS
      • GRAPHENE AND TWO DIMENSIONAL MATERIALS FOR NANOELECTRONICS
      • MATERIALS AND DEVICES FOR INFORMATION STORAGE AND EMERGING ELECTRONICS
      • MATERIALS FOR NANOLITHOGRAPHY AND ORGANIC ELECTRONICS
      • MOLECULAR ENGINEERING OF PHOTO-FUNCTIONAL SELF-ASSEMBLED NANOSYSTEMS
      • MOLECULAR MATERIALS AS COMPONENTS OF ELECTRONIC DEVICES
      • NANOSTRUCTURES FOR NANOELECTRONICS, PHOTONICS AND SENSORS
      • PLASMA ENABLED NANOFABRICATION AND APPLICATIONS
      • OPTICAL BIOSENSORS
      • POLYMER BASED SENSOR AND SYSTEMS
      • THEORETICAL MODELING OF WAVES IN THE MICRO AND NANOSCALE
      • THIN FILMS BY CHEMICAL VAPOR AND ATOMIC LAYER DEPOSITION
      • THIN FILM DEVICES FOR MICROSYSTEMS AND LARGE AREA ELECTRONICS
    • Nanochemistry and Nanomaterials
      • ADVANCED CERAMICS AND COMPOSITES
      • FUNCTIONAL NANOMATERIALS OF ORGANIZED STRUCTURE
      • CATALYTIC-PHOTOCATALYTIC PROCESSES AND ENVIRONMENTAL ANALYSIS
      • MEMBRANES AND MATERIALS FOR ENVIRONMENTAL SEPARATIONS
      • MOLECULAR THERMODYNAMICS AND MODELING OF MATERIALS
      • NANOTECHNOLOGY PROCESSES FOR SOLAR ENERGY CONVERSION AND ENVIRONMENTAL PROTECTION
      • TRANSPORT OF MATTER PHENOMENA IN POLYMERS
    • Funded Projects
    • Expoitation of research results
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  • EDUCATION
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  • PERSONNEL
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  • NANOELECTRONICS, PHOTONICS AND MICROSYSTEMS
    • Circuits and Devices for Sensor Networks and Systems
    • Electron Microscopy and Nanomaterials
    • Energy Harvesting and Autonomous Sensors
    • Graphene and two Dimensional Materials for Nanoelectronics
    • Materials and Devices for Information Storage and Emerging Electronics – About the Group
    • Materials for Nanolithography and Organic Electronics
    • Molecular Engineering of Photo-Functional Self-Assembled Nanosystems
    • Molecular Materials as Components of Electronic Devices
    • Nanostructures for Nanoelectronics, Photonics and Sensors
    • Optical Biosensors
    • Plasma Enabled Nanofabrication and Applications
    • Polymer Based Sensor and Systems
    • Theoretical Modeling of Waves in the Micro and Nanoscale
    • Thin Films By Chemical Vapor and Atomic Layer Deposition
    • Thin Film Devices for Microsystems and Large Area Electonics

THIN FILMS BY CHEMICAL VAPOR AND ATOMIC LAYER DEPOSITION – Publications-Conferences


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