ABOUT

Welcome to our Plasma group. Our work spans a large variety of topics from plasma science and technology to its diverse applications in nanofabrication, nanotechnology, functional surfaces and devices for water and energy harvesting, plasma processing for food and medicine, microfluidics, and nanoelectronics. The nanostructures produced via plasma processing need modern nanometrology methods for quantification, and thus our group has a strong activity in computational nanometrology. In addition, we need to fully understand and predict plasma processes and wetting phenomena, therefore, a significant activity is devoted to process modelling and simulation.

We collaborate with the clean room facility, often transferring samples to and from it, the Microfluidics, Lab- & Organ-on-Chip project as well as several other projects within INN, institutes in NCSRD and partners in Greece and abroad.

Our work spans the whole range from quality basic research, applied research, innovative technology development and finally technology transfer. We are proud of several patents, collaborations with industry and two spin-off companies. This unique combination of diverse plasma activities and applications coupled with accurate characterization, predictive simulation and industry relations are our strong points that make us a highly respectable international plasma group.

Plasma Nanotechnology and Group History

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Vacuum Plasma Technology and Nanofabrication

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Atmospheric Pressure Plasma Technology

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“Smart” Multifunctional Surfaces

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Water and Energy Harvesting Surfaces and Devices

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Plasmas for Food, Agriculture and Medicine

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Computational Nanometrology

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Process Analysis and Simulation

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“Smart” Microfluidics and Lab-on-a-Chip

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Collaboration with the Clean Room Facility for Nanoelectronics and MEMS

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Technology Transfer and Spin-off Creation

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Evangelos Gogolides
#Research Director See Details
Angeliki Tserepi
#Research Director See Details
Vassilios Constantoudis
#Senior Researcher See Details
Dimosthenis Ioannou
#PhD candidate See Details
Alexandros Kondi
#PhD candidate See Details
Dimitrios Nioras
#PhD candidate See Details
George Papavieros
#PhD candidate See Details
Dimitrios Passaras
#PhD candidate See Details
Panagiotis Sarkiris
#PhD candidate See Details
Dafni Papadopoulou
#Post-graduate student See Details
FORMER GROUP MEMBERS
Panagiotis Dimitrakellis
#Former group member See Details
Athanasios Smyrnakis
#Former group member See Details

High density plasma etching for DRIE of Si

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High density plasma etching for DRIE of polymers

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High density plasma micro- nanotexturing system

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Atmospheric pressure plasma surface modification & water treatment systems

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Ultrasonic welding machine

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Thermal press

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Contact angle, surface energy, surface tension measurement systems

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Plasma emission spectrophotometers

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Plasma electrical characterization equipment

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Specular and total reflectance and transmittance measurement systems

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Spectroscopic ellipsometer

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Computer cluster for simulation work

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(INRASTES, NCSR-D) S. Kakabakos, P. Petrou

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(IIT, NCSR-D) G. Giannakopoulos

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(NTUA) A. Boudouvis, A. Papathanasiou, D.S. Mathioulakis, P. Taoukis, C. Charitides, I. Zergioti, A. Karantonis

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(NKUA) F. Diakonos, K. Poulios, A. Economou

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(Univ. of Patras) E. Amanatides, D. Mataras, D. Skarlatos, P. Svarnas

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(UOI) E. Lidorikis

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(UNIWA) G.P. Patsis

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(HAO-DEMETER) G. Katsaros

(ILSP, R.C. Athena) H. Papageorgiou

(BIC Violex SA) K. Mavroidis, C. Pandis

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(Fasmatech SA) D. Papanastasiou

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(IMEC) G. Lorusso, V. Rutigliani

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(KLA Corporation) A. Vaglio Pret

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(Inst. of Physics, Belgrade) Z. Petrovic, N. Puač, S. Lazovic, N. Skoro

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(Jožef Stefan Inst.) U. Cvelbar

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(ETH, Switzerland) D. Poulikakos

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(MPIP-Mainz, Germany) H.-J. Butt, M. Kappl, Youmin Hou

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(UCL-UK) Tiwari Manish Kumar

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(IIT-Italy) I. Bayer

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(CNRS) C. Vahlas

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(VSL) R. Koops

(Uppsala University) Xi Chen, Zhen Zhang

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(MIT-USA) D. Papageorgiou

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(University of Cambridge) I. Kontoyiannis

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